Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949145 | Vapor-assisted cryogenic cleaning | Harlan Chung | 2005-09-27 |
| 6905556 | Method and apparatus for using surfactants in supercritical fluid processing of wafers | Raashina Humayun, Patrick Joyce, Adrianne K. Tipton, Krishnan Shrinivasan, Dennis W. Hess +1 more | 2005-06-14 |
| 6852173 | Liquid-assisted cryogenic cleaning | Harlan Chung | 2005-02-08 |
| 6848458 | Apparatus and methods for processing semiconductor substrates using supercritical fluids | Krishnan Shrinivasan, Francisco Juarez, Karen A. Reinhardt, Sanjay Gopinath | 2005-02-01 |