Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6848458 | Apparatus and methods for processing semiconductor substrates using supercritical fluids | Krishnan Shrinivasan, Souvik Banerjee, Francisco Juarez, Sanjay Gopinath | 2005-02-01 |