Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905556 | Method and apparatus for using surfactants in supercritical fluid processing of wafers | Raashina Humayun, Patrick Joyce, Adrianne K. Tipton, Dennis W. Hess, Satyanarayana Myneni +1 more | 2005-06-14 |
| 6848455 | Method and apparatus for removing photoresist and post-etch residue from semiconductor substrates by in-situ generation of oxidizing species | Adrianne K. Tipton | 2005-02-01 |
| 6848458 | Apparatus and methods for processing semiconductor substrates using supercritical fluids | Souvik Banerjee, Francisco Juarez, Karen A. Reinhardt, Sanjay Gopinath | 2005-02-01 |