Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951765 | Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor | Sanjay Gopinath, Patrick A. Van Cleemput, Michelle T. Schulberg, Sasangan Ramanathan, Francisco Juarez | 2005-10-04 |
| 6905556 | Method and apparatus for using surfactants in supercritical fluid processing of wafers | Raashina Humayun, Adrianne K. Tipton, Krishnan Shrinivasan, Dennis W. Hess, Satyanarayana Myneni +1 more | 2005-06-14 |