Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951765 | Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor | Sanjay Gopinath, Michelle T. Schulberg, Sasangan Ramanathan, Francisco Juarez, Patrick Joyce | 2005-10-04 |
| 6867152 | Properties of a silica thin film produced by a rapid vapor deposition (RVD) process | Dennis M. Hausmann, Adrianne K. Tipton, Bunsen B. Nie, Francisco Juarez, Teresa Pong | 2005-03-15 |
| 6846391 | Process for depositing F-doped silica glass in high aspect ratio structures | George D. Papasouliotis, Robert Tas, Bart J. van Schravendijk | 2005-01-25 |