Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846391 | Process for depositing F-doped silica glass in high aspect ratio structures | George D. Papasouliotis, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2005-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846391 | Process for depositing F-doped silica glass in high aspect ratio structures | George D. Papasouliotis, Patrick A. Van Cleemput, Bart J. van Schravendijk | 2005-01-25 |