Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951765 | Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor | Patrick A. Van Cleemput, Michelle T. Schulberg, Sasangan Ramanathan, Francisco Juarez, Patrick Joyce | 2005-10-04 |
| 6848458 | Apparatus and methods for processing semiconductor substrates using supercritical fluids | Krishnan Shrinivasan, Souvik Banerjee, Francisco Juarez, Karen A. Reinhardt | 2005-02-01 |