Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905556 | Method and apparatus for using surfactants in supercritical fluid processing of wafers | Raashina Humayun, Patrick Joyce, Adrianne K. Tipton, Krishnan Shrinivasan, Satyanarayana Myneni +1 more | 2005-06-14 |