Issued Patents 2005
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976906 | Apparatus for reducing compressed dry air usage during chemical mechanical planarization | David Wei, Yehiel Gotkis | 2005-12-20 |
| 6953515 | Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection | Michael S. Lacy | 2005-10-11 |
| 6945856 | Subaperture chemical mechanical planarization with polishing pad conditioning | Michael S. Lacy, David G. Halley | 2005-09-20 |
| 6936133 | Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool | Michael S. Lacy | 2005-08-30 |
| 6913521 | Methods using active retainer rings for improving edge performance in CMP applications | Alek Owczarz, Rod Kistler | 2005-07-05 |
| 6910240 | Wafer bevel edge cleaning system and apparatus | Fred C. Redecker, James P. Garcia | 2005-06-28 |
| 6899601 | Method and apparatus for conditioning a polishing pad | — | 2005-05-31 |
| 6869337 | System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques | Yehiel Gotkis, Rod Kistler | 2005-03-22 |
| 6864181 | Method and apparatus to form a planarized Cu interconnect layer using electroless membrane deposition | Fred C. Redeker | 2005-03-08 |
| 6858091 | Method for controlling galvanic corrosion effects on a single-wafer cleaning system | Mike Ravkin, Katrina Mikhaylich | 2005-02-22 |
| 6857435 | Method and apparatus for cooling a resonator of a megasonic transducer | John deLarios, Carl Woods | 2005-02-22 |
| 6845778 | In-situ local heating using megasonic transducer resonator | Katrina Mikhaylich | 2005-01-25 |