Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913521 | Methods using active retainer rings for improving edge performance in CMP applications | Alek Owczarz, John M. Boyd | 2005-07-05 |
| 6869337 | System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques | John M. Boyd, Yehiel Gotkis | 2005-03-22 |