Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949411 | Method for post-etch and strip residue removal on coral films | Katrina Mikhaylichenko, Michael Ravkin | 2005-09-27 |
| 6857435 | Method and apparatus for cooling a resonator of a megasonic transducer | John M. Boyd, Carl Woods | 2005-02-22 |
| 6851436 | Substrate processing using a fluid re-circulation system in a wafer scrubbing system | Michael Ravkin, Afshin Nickhou, Katrina Mikhaylichenko, James P. Garcia | 2005-02-08 |