Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6910240 | Wafer bevel edge cleaning system and apparatus | John M. Boyd, Fred C. Redecker | 2005-06-28 |
| 6851436 | Substrate processing using a fluid re-circulation system in a wafer scrubbing system | Michael Ravkin, John deLarios, Afshin Nickhou, Katrina Mikhaylichenko | 2005-02-08 |