Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6866051 | Megasonic substrate processing module | Randolph Treur, Michael Ravkin | 2005-03-15 |
| 6851436 | Substrate processing using a fluid re-circulation system in a wafer scrubbing system | Michael Ravkin, John deLarios, Katrina Mikhaylichenko, James P. Garcia | 2005-02-08 |