Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6866051 | Megasonic substrate processing module | Afshin Nickhou, Michael Ravkin | 2005-03-15 |
| 6848194 | Apparatus for monitoring a semiconductor wafer during a spin drying operation | — | 2005-02-01 |