Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954993 | Concentric proximity processing head | Michael G. R. Smith, Robert O'Donnell | 2005-10-18 |
| 6949411 | Method for post-etch and strip residue removal on coral films | Katrina Mikhaylichenko, John deLarios | 2005-09-27 |
| 6866051 | Megasonic substrate processing module | Afshin Nickhou, Randolph Treur | 2005-03-15 |
| 6851436 | Substrate processing using a fluid re-circulation system in a wafer scrubbing system | John deLarios, Afshin Nickhou, Katrina Mikhaylichenko, James P. Garcia | 2005-02-08 |