Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954993 | Concentric proximity processing head | Michael G. R. Smith, Michael Ravkin | 2005-10-18 |
| 6852636 | Insitu post etch process to remove remaining photoresist and residual sidewall passivation | — | 2005-02-08 |