Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951042 | Brush scrubbing-high frequency resonating wafer processing system and methods for making and implementing the same | Fritz Redeker | 2005-10-04 |
| 6949411 | Method for post-etch and strip residue removal on coral films | Michael Ravkin, John deLarios | 2005-09-27 |
| 6851436 | Substrate processing using a fluid re-circulation system in a wafer scrubbing system | Michael Ravkin, John deLarios, Afshin Nickhou, James P. Garcia | 2005-02-08 |