Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976906 | Apparatus for reducing compressed dry air usage during chemical mechanical planarization | John M. Boyd, Yehiel Gotkis | 2005-12-20 |
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, Linda (Tong) Jiang, Katgenhalli Y. Ramanujam +4 more | 2005-05-24 |
| 6878048 | CMP belt stretch compensation apparatus and methods for using the same | Yehiel Gotkis, Aleksander Owzarz | 2005-04-12 |