Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953750 | Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization | Patrick P. Wu, Tuan Nguyen, Ren Zhou | 2005-10-11 |
| 6949016 | Gimballed conditioning apparatus | Anthony de la Llera | 2005-09-27 |
| 6939212 | Porous material air bearing platen for chemical mechanical planarization | — | 2005-09-06 |
| 6896600 | Liquid dispense manifold for chemical-mechanical polisher | Patrick P. Wu, Tony Luong | 2005-05-24 |
| 6896586 | Method and apparatus for heating polishing pad | Tuan Nguyen, Ren Zhou, David Wei, Linda (Tong) Jiang, Katgenhalli Y. Ramanujam +4 more | 2005-05-24 |
| 6872128 | System, method and apparatus for applying liquid to a CMP polishing pad | Ren Zhou, Wen-Chiang Tu | 2005-03-29 |
| 6869339 | Polishing pad and method of manufacture | — | 2005-03-22 |