Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, Ren Zhou, David Wei, Linda (Tong) Jiang +4 more | 2005-05-24 |
| 6896600 | Liquid dispense manifold for chemical-mechanical polisher | Patrick P. Wu, Xuyen Pham | 2005-05-24 |