Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953750 | Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization | Xuyen Pham, Tuan Nguyen, Ren Zhou | 2005-10-11 |
| 6896600 | Liquid dispense manifold for chemical-mechanical polisher | Xuyen Pham, Tony Luong | 2005-05-24 |
| 6858171 | Method for making reinforced belt pad for linear chemical mechanical planarization | — | 2005-02-22 |