Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953750 | Methods and systems for controlling belt surface temperature and slurry temperature in linear chemical mechanical planarization | Patrick P. Wu, Xuyen Pham, Tuan Nguyen | 2005-10-11 |
| 6896586 | Method and apparatus for heating polishing pad | Xuyen Pham, Tuan Nguyen, David Wei, Linda (Tong) Jiang, Katgenhalli Y. Ramanujam +4 more | 2005-05-24 |
| 6872128 | System, method and apparatus for applying liquid to a CMP polishing pad | Xuyen Pham, Wen-Chiang Tu | 2005-03-29 |