Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976901 | In situ feature height measurement | Greg Barbour | 2005-12-20 |
| 6945856 | Subaperture chemical mechanical planarization with polishing pad conditioning | John M. Boyd, Michael S. Lacy | 2005-09-20 |
| 6921719 | Method of preparing whole semiconductor wafer for analysis | Allan Paterson | 2005-07-26 |
| 6887133 | Pad support method for chemical mechanical planarization | — | 2005-05-03 |
| 6885206 | Device for supporting thin semiconductor wafers | — | 2005-04-26 |
| 6855030 | Modular method for chemical mechanical planarization | — | 2005-02-15 |