Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976901 | In situ feature height measurement | David G. Halley | 2005-12-20 |
| 6884150 | Polishing pad sensor assembly with a damping pad | — | 2005-04-26 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976901 | In situ feature height measurement | David G. Halley | 2005-12-20 |
| 6884150 | Polishing pad sensor assembly with a damping pad | — | 2005-04-26 |