Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960510 | Method of making sub-lithographic features | Toshiharu Furukawa, David V. Horak, Wesley C. Natzle, Akihisa Sekiguchi, Len Yuan Tsou +1 more | 2005-11-01 |
| 6930030 | Method of forming an electronic device on a recess in the surface of a thin film of silicon etched to a precise thickness | Werner Rausch, Tina Wagner | 2005-08-16 |
| 6903023 | In-situ plasma etch for TERA hard mask materials | Richard S. Wise, Wendy Yan, Soctt D. Allen, Arpan Mahorowala | 2005-06-07 |
| 6887798 | STI stress modification by nitrogen plasma treatment for improving performance in small width devices | Bruce B. Doris, Werner Rausch, James A. Slinkman | 2005-05-03 |
| 6884734 | Vapor phase etch trim structure with top etch blocking layer | Frederick Buehrer, Derek Chen, William Chu, Scott W. Crowder, David V. Horak +4 more | 2005-04-26 |
| 6864041 | Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching | Jeffrey J. Brown, David V. Horak, Maheswaran Surendra, Len Yuan Tsou, Qingyun Yang +2 more | 2005-03-08 |