Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960510 | Method of making sub-lithographic features | Sadanand V. Deshpande, Toshiharu Furukawa, David V. Horak, Wesley C. Natzle, Akihisa Sekiguchi +1 more | 2005-11-01 |
| 6884734 | Vapor phase etch trim structure with top etch blocking layer | Frederick Buehrer, Derek Chen, William Chu, Scott W. Crowder, Sadanand V. Deshpande +4 more | 2005-04-26 |
| 6864041 | Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching | Jeffrey J. Brown, Sadanand V. Deshpande, David V. Horak, Maheswaran Surendra, Qingyun Yang +2 more | 2005-03-08 |