Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864041 | Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching | Sadanand V. Deshpande, David V. Horak, Maheswaran Surendra, Len Yuan Tsou, Qingyun Yang +2 more | 2005-03-08 |