Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930030 | Method of forming an electronic device on a recess in the surface of a thin film of silicon etched to a precise thickness | Werner Rausch, Sadanand V. Deshpande | 2005-08-16 |
| 6878624 | Pre-anneal of CoSi, to prevent formation of amorphous layer between Ti-O-N and CoSi | John Bruley, Cyril Cabral, Jr., Christian Lavoie, Yun-Yu Wang, Horati S. Wildman +1 more | 2005-04-12 |
| 6869542 | Hard mask integrated etch process for patterning of silicon oxide and other dielectric materials | Sadanand V. Desphande, David M. Dobuzinsky, Arpan Mahorowala, Richard S. Wise | 2005-03-22 |