Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869542 | Hard mask integrated etch process for patterning of silicon oxide and other dielectric materials | David M. Dobuzinsky, Arpan Mahorowala, Tina Wagner, Richard S. Wise | 2005-03-22 |