Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836530 | Illumination system with a plurality of individual gratings | Wolfgang Singer, Markus Weiss, Bernd Kleemann, Karlfried Osterried, Johannes Wangler +2 more | 2004-12-28 |
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser, Gerrit-Jan Heerens +4 more | 2004-08-24 |
| 6721389 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more | 2004-04-13 |
| 6714279 | Lithographic projection apparatus, device manufacturing method and device manufactured thereby | Jeroen Jonkers | 2004-03-30 |
| 6678037 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Hugo Matthieu Visser, Levinus Pieter Bakker | 2004-01-13 |