Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Henri Gerard Cato Werij, Hugo Matthieu Visser, Gerrit-Jan Heerens +4 more | 2004-08-24 |
| 6741329 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Erik Roelof Loopstra, Noud Jan Gilissen, Markus Franciscus Antonius Eurlings | 2004-05-25 |
| 6678037 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker | 2004-01-13 |