Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Gerrit-Jan Heerens +4 more | 2004-08-24 |
| 6774374 | Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses | Johannes C. Driessen, Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Marinus J. J. Dona, Mark Meuwese +2 more | 2004-08-10 |
| 6753941 | Lithographic apparatus and device manufacturing method | — | 2004-06-22 |
| 6724462 | Capping layer for EUV optical elements | Mandeep Singh | 2004-04-20 |
| 6678037 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Levinus Pieter Bakker | 2004-01-13 |