Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6816238 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Hermanus M. J. R. Soemers, Johannes C. Driessen, Michael J. M. Renkens, Adrianus G. Bouwer | 2004-11-09 |
| 6774374 | Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses | Johannes C. Driessen, Theodorus Hubertus Josephus Bisschops, Marinus J. J. Dona, Mark Meuwese, Ronald Maarten Schneider +2 more | 2004-08-10 |
| 6747731 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Eric W. A. Janssen, Marcel J. M. Renkens, Ronald Maarten Schneider, Theo H. J. Bisschops, Rob Tabor | 2004-06-08 |