Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6816238 | Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Adrianus G. Bouwer | 2004-11-09 |
| 6774374 | Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses | Theodorus Hubertus Josephus Bisschops, Jakob Vijfvinkel, Marinus J. J. Dona, Mark Meuwese, Ronald Maarten Schneider +2 more | 2004-08-10 |
| 6740891 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Johannes Petrus Martinus Bernardus Vermeulen, Antonius Maria Rijken | 2004-05-25 |