Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777140 | Lithographic apparatus, device manufacturing methods, devices manufactured thereby, method of manufacturing a reflector, reflector manufactured thereby and phase shift mask | Josephus J. M. Braat | 2004-08-17 |
| 6738188 | Multilayer extreme ultraviolet mirrors with enhanced reflectivity | — | 2004-05-18 |
| 6724462 | Capping layer for EUV optical elements | Hugo Matthieu Visser | 2004-04-20 |