Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800861 | Mirror projection system for a scanning lithographic projection apparatus, and lithographic apparatus comprising such a system | — | 2004-10-05 |
| 6788644 | Devuce and method for forming a focus error signal based on ohase difference between corresponding parts of detector signals | — | 2004-09-07 |
| 6781104 | Device for scanning an optical record carrier | — | 2004-08-24 |
| 6781740 | Achromatic phase shift device and interferometer using achromatic phase shift device | Hendrik Bokhove | 2004-08-24 |
| 6777140 | Lithographic apparatus, device manufacturing methods, devices manufactured thereby, method of manufacturing a reflector, reflector manufactured thereby and phase shift mask | Mandeep Singh | 2004-08-17 |