Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6781673 | Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Hugo Matthieu Visser, Gerrit-Jan Heerens +4 more | 2004-08-24 |