Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6791665 | Lithographic projection apparatus and device manufacturing method | Ralph Kurt, Frank Jeroen Pieter Schuurmans | 2004-09-14 |
| 6678037 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Hugo Matthieu Visser | 2004-01-13 |