| 6791443 |
Actuator and transducer |
— |
2004-09-14 |
| 6781673 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Martinus Hendrikus Antonius Leenders, Henri Gerard Cato Werij, Hugo Matthieu Visser +4 more |
2004-08-24 |
| 6765218 |
Lithographic projection apparatus with positioning system for use with reflectors |
Antonius Johannes Josephus Van Dijsseldonk |
2004-07-20 |
| 6750949 |
Lithographic apparatus and device manufacturing method |
Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors, Albrecht Hof +3 more |
2004-06-15 |
| 6741329 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors, Noud Jan Gilissen, Markus Franciscus Antonius Eurlings |
2004-05-25 |
| 6730920 |
Abbe arm calibration system for use in lithographic apparatus |
Rogier Herman Mathijs Groeneveld, Jacobus Burghoom, Leon Martin Levasier, Alexander Straaijer |
2004-05-04 |
| 6721389 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan +1 more |
2004-04-13 |
| 6710353 |
Actuator and transducer |
— |
2004-03-23 |
| 6674510 |
Off-axis levelling in lithographic projection apparatus |
Johannes Christiaan Maria Jasper, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Nicolaas Antonius Allegondus Johannes Van Asten, Frederik T. E. Heuts +5 more |
2004-01-06 |