Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6674510 | Off-axis levelling in lithographic projection apparatus | Johannes Christiaan Maria Jasper, Erik Roelof Loopstra, Theodorus Marinus Modderman, Gerrit Johannes Nijmeijer, Frederik T. E. Heuts +5 more | 2004-01-06 |