Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730920 | Abbe arm calibration system for use in lithographic apparatus | Rogier Herman Mathijs Groeneveld, Erik Roelof Loopstra, Jacobus Burghoom, Alexander Straaijer | 2004-05-04 |
| 6710849 | Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method | Yim-Bun Patrick Kwan | 2004-03-23 |