Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819425 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2004-11-16 |
| 6710849 | Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method | Leon Martin Levasier | 2004-03-23 |