Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6765218 | Lithographic projection apparatus with positioning system for use with reflectors | Erik Roelof Loopstra | 2004-07-20 |
| 6765712 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Erik Loopstra, Dominicus Jacobus Petrus Adrianus Franken | 2004-07-20 |
| 6750949 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Johannes Hubertus Josephina Moors, Albrecht Hof +3 more | 2004-06-15 |
| 6737662 | Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product | Heine Melle Mulder, Jan Bernard Plechelmus Van Schoot, Markus Franciscus Antonius Eurlings, Marcel Mathijs Theodore Marie Dierichs | 2004-05-18 |