Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787789 | Method of measuring aberration of a projection system of a lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2004-09-07 |
| 6721389 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2004-04-13 |
| 6710856 | Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Marcel Mathijs Theodore Marie Dierichs, Hendrikus Robertus Marie Van Greevenbroek, Markus Franciscus Antonius Eurlings | 2004-03-23 |