Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6747282 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Haico Victor Kok | 2004-06-08 |
| 6721389 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Hans Van Der Laan, Johannes Hubertus Josephina Moors +1 more | 2004-04-13 |