Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836530 | Illumination system with a plurality of individual gratings | Markus Weiss, Bernd Kleemann, Karlfried Osterried, Johannes Wangler, Frank Melzer +2 more | 2004-12-28 |
| 6806942 | Projection exposure system | Karl-Heinz Schuster, Wilhelm Ulrich, Toralf Gruner, Daniel Kraehmer, Alexander Epple +2 more | 2004-10-19 |