Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806942 | Projection exposure system | Karl-Heinz Schuster, Toralf Gruner, Daniel Kraehmer, Wolfgang Singer, Alexander Epple +2 more | 2004-10-19 |
| 6791761 | Optical projection lens system | David Shafer | 2004-09-14 |
| 6788471 | Projection exposure apparatus for microlithography | Christian Wagner | 2004-09-07 |
| 6765729 | Catadioptric reduction lens | Jean-Claude Perrin, Alexander Epple | 2004-07-20 |
| 6717722 | Catadioptric optical system and exposure apparatus having the same | David Shafer, Helmut Beierl, Gerhard Furter, Karl-Heinz Schuster | 2004-04-06 |
| 6710917 | 8-mirror microlithography projection objective | Hans-Jurgen Mann, Gunther Seitz | 2004-03-23 |