Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836530 | Illumination system with a plurality of individual gratings | Wolfgang Singer, Markus Weiss, Bernd Kleemann, Karlfried Osterried, Frank Melzer +2 more | 2004-12-28 |
| 6733165 | Optical integrator for an illumination device | Sijbe Abraham Van Der Lei, Marnix Aldert Tas, Jan Hoegee, Paul Van Der Veen, Jess Koehler | 2004-05-11 |
| 6707537 | Projection exposure system | Nils Dieckmann, Jess Köhler | 2004-03-16 |
| 6680803 | Partial objective in an illuminating systems | Jorg Schultz, Alexander Sohmer, Alexander Epple, Christa Muller | 2004-01-20 |