Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770894 | Illumination system with field mirrors for producing uniform scanning energy | — | 2004-08-03 |
| 6704095 | Control of a distribution of illumination in an exit pupil of an EUV illumination system | — | 2004-03-09 |
| 6680803 | Partial objective in an illuminating systems | Alexander Sohmer, Alexander Epple, Johannes Wangler, Christa Muller | 2004-01-20 |