Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733165 | Optical integrator for an illumination device | Sijbe Abraham Van Der Lei, Marnix Aldert Tas, Jan Hoegee, Jess Koehler, Johannes Wangler | 2004-05-11 |
| 6700646 | Lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens | 2004-03-02 |